C-MEMS/NEMS for Energy Storage and Biosensing Applications

Event information

Dr. Chunlei Wang

Department of Mechanical and Materials Engineering,

Florida International University

Refreshment will be served at 1:15 pm


Carbon microelectromechanical systems (C-MEMS) and carbon nanoelectromechanical systems (C-NEMS) have received much attention because of their various potential applications, such as: microbatteries and DNA arrays. Microfabrication of carbon structures using current processing technology, including focused ion beam (FIB) and reactive ion etching (RIE), is time consuming and expensive. Low feature resolution, and poor repeatability of the carbon composition as well as widely varying properties of the resulting devices limits the use of scree printing of commercial carbon inks for C-MEMS. Our newly developed 3D C-MEMS/NEMS microfabrication technique is based on the pyrolysis of photo patterned resists at high temperatures in an oxygen free environment. It is possible to use the C-MEMS/NEMS technique to create various complex 3D carbon structures, such as: high aspect ratio carbon post arrays and suspended carbon nano wires. They can have a wide variety of shapes, resistivities and mechanical properties. We demonstrate that C-MEMS/NEMS with sizes ranging from the millimeter to the micrometer and even nanometer is very possible to provide solutions, alone or in combination with silicon and other organic, inorganic, and biological materials, in miniaturized power systems (Li-ion batteries, ultracapacitors, biofuel cells) and biosensors (such as: glucose sensors and aptamer sensors).


Chunlei (Peggy) Wang is an associate professor in the Mechanical and Materials Engineering Department at Florida International University. She received her MS (1993) and PhD (1997) in Solid State Physics from Jilin University (China). Before joining FIU, she held various research positions at Osaka University (1995-2001) and University of California Irvine (2001-2006). At FIU, her group focuses on the development of micro and nanofabrication methods for building novel micro and nanostructures and synthesizing nanomaterials that have unique structures and useful properties for energy and biological applications. She published in 5 book chapters, 90 peer reviewed journal publications, and 10 patent. She is a recipient of FIU faculty award in research and creative activities (2013), FIU Kauffman Professor Award (2009), and DARPA Young Faculty Award (2008). She was a co-founder of Carbon Microbattery Corporation (now: Enevate Corp), a consultant at Intel Lab, and a guest scientist at Max Planck Institute.

The event is free and open to the public.